產 品 | 簡 介 |
晶圓隨機缺陷檢測軟平台 - 1 - To classify defect identity - To identify killer and non-killer defects - To remove non-killer defects - Killer defects left |
Auto Defect Classification Soft Platform The world’s best random defect solution, predict non-killer defects with >99.9% accuracy before SEM images’ shot. Screen non-killer defects has proven the catch of true failure random defect multiple times better than competitors’ in a 28nm Semiconductor Fab. |
晶圓隨機缺陷檢測軟平台 - 2 - To identify and remove in-line lower risk defects - To select higher risk killer defect samples |
Auto Defect Sample Soft Platform By picking defect samples from the killer defects group using killer defect index (KDI) that targets true failure random defects. |
晶圓系統性缺陷檢測軟平台 - To catch weak patterns |
Weak Pattern Group and Sample Soft Platform By catching the Systematic defect patterns with both basic and advanced pattern grouping methods as well as smart GUI design intelligently. Weak pattern library help users manage systematic defects’ patterns much more efficiently. |
晶圓缺陷檢測自動化-方案 - The automation process between Defect Inspection and Review SEM & Image |
To trigger new defect job. To execute defect job. To upload defect results to the server. To save a tremendous amount of time cost |